MFC10FD Mass Flow Controller
Thermal Mass Flow Controller for Precise Gas Flow Measurement and Control
The MFC10FD Mass Flow Controller is a compact thermal mass flow controller designed for accurate measurement and closed-loop control of gas mass flow. It integrates a thermal mass flow sensor, laminar flow element, control valve, and electronic control circuit into one unit.
Using the thermal mass flow measurement principle, the MFC10FD measures gas mass flow based on the temperature difference generated by heat transfer through a capillary sensing tube. Because the measurement is based on mass flow, it is largely independent of changes in gas temperature and pressure under normal operating conditions.
The measured flow signal is amplified and compared with the user-defined setpoint. The controller then drives the proportional control valve according to the difference between the measured flow and setpoint, providing closed-loop gas flow control.
The MFC10FD is suitable for applications requiring stable and repeatable gas flow measurement and control, including gas mixing, gas distribution, analytical instruments, semiconductor and solar equipment, environmental monitoring, and laboratory systems.
Key Features
- Thermal mass flow measurement with fast response and high accuracy
- Integrated mass flow measurement and control in a compact design
- Capillary thermal sensing technology for direct gas mass flow measurement
- Wide flow range: 2 SCCM to 30 SLM
- 100:1 turndown ratio for flexible flow control
- Fast response time: less than 0.8 seconds
- Low pressure drop: less than 0.01 MPa
- RS232/RS485 communication with MODBUS protocol
- Multiple analog outputs: 0–5 V, 1–5 V, and 4–20 mA
- Digital input/output for connection to secondary displays, flow computers, or control systems
- Stainless steel construction for reliable industrial and laboratory use
- Available with different sealing materials and process connections
- Suitable for low-pressure and high-pressure gas flow applications
How the MFC10FD Works
The MFC10FD uses a thermal mass flow measurement principle based on heat transfer through a capillary tube.
A controlled amount of gas passes through the sensor’s capillary tube. As the gas flows through the heated sensing section, it carries heat away from the tube. The resulting temperature distribution or temperature difference is related to the gas mass flow rate.
The sensor converts this thermal response into an electrical flow signal. The controller compares the measured flow with the preset flow value and adjusts the integrated control valve accordingly.
This creates a closed-loop control system that continuously regulates the gas flow to match the required setpoint.
Measurement → Comparison → Valve Control → Stable Gas Flow
This design provides fast response, good repeatability, and stable gas flow control for demanding gas-handling applications.
Why Choose MFC10FD?
Fast Response
Response time of less than 0.8 seconds enables rapid adjustment to changing gas flow setpoints.
Wide Turndown Ratio
A 100:1 turndown ratio provides flexible gas flow control over a wide operating range.
Stable Closed-Loop Control
The integrated proportional valve continuously adjusts gas flow according to the difference between actual flow and the target setpoint.
Multiple Communication Options
RS485/RS232 with MODBUS and multiple analog outputs simplify integration with PLCs, computers, flow computers, and laboratory systems.
Compact Integrated Design
The sensor, laminar flow element, control valve, and electronic control circuit are integrated into a compact MFC platform.
Typical Gas Flow Control Applications
The MFC10FD thermal mass flow controller can be used for:
- Gas mixing and blending
- Gas distribution systems
- Laboratory gas control
- Analytical instruments
- Environmental monitoring equipment
- Solar and photovoltaic manufacturing equipment
- Industrial process gas control
- Gas generation systems
- Research and development equipment
- Automated gas delivery systems