MFC20FC High-Precision Differential Pressure Mass Flow Controller
MFC20FC is a high-accuracy differential pressure mass flow controller designed for low-flow gas measurement and control. With ±0.5% F.S. accuracy, 100:1 measurement rangeability, fast response of less than 0.2 seconds, and optional PID control, it provides stable and precise gas flow control for semiconductor, gas analysis, laboratory, vacuum coating and other process applications. Available flow ranges include **100 SCCM to 30 SLM**, with multiple signal, communication and connection options.
MFC10FC Differential Pressure Mass Flow Controller
The MFC10FC uses differential pressure-based mass flow measurement, providing stable measurement without thermal drift or response lag. It can measure and display flow rate, total flow, pressure, and temperature simultaneously. An optional proportional solenoid valve and built-in PID control enable precise gas flow regulation. Unlike thermal mass flow meters, it is not affected by specific heat capacity when using gas conversion factors, maintaining reliable accuracy even when the measured gas differs from the factory calibration gas.