MFC20FE Coriolis Mass Flow Controller

MFC20FE-L Coriolis mass flow controller applications

MFC20FE is a high-accuracy Coriolis mass flow controller for gas and liquid measurement. It provides ±0.5% F.S. accuracy for gas and ±0.25% F.S. for liquid, with fast response, integrated PID control, and simultaneous density and temperature measurement.

MFC20FC High-Precision Differential Pressure Mass Flow Controller

MFC20FC-L differential pressure mass flow controller

MFC20FC is a high-accuracy differential pressure mass flow controller designed for low-flow gas measurement and control. With ±0.5% F.S. accuracy, 100:1 measurement rangeability, fast response of less than 0.2 seconds, and optional PID control, it provides stable and precise gas flow control for semiconductor, gas analysis, laboratory, vacuum coating and other process applications. Available flow ranges include **100 SCCM to 30 SLM**, with multiple signal, communication and connection options.

High-Accuracy Mass Flow Meter & Controller MFC20FD

MF20FD Thermal Gas Mass Flow Meter Controller

MFC20FD is a high-accuracy thermal mass flow meter and controller designed for precise gas flow measurement and closed-loop control. With ±0.5% F.S. accuracy, <0.1 s fast response, and a 2 SCCM to 30 SLM flow range, it provides reliable performance for laboratory, analytical, gas mixing, solar, and industrial applications. RS485/MODBUS and multiple analog interfaces enable easy integration with automated control systems.

Digital Mass Flow Meter & Controller MFC10FD

Digital Mass Flow Controller (MFC) used for precise gas flow control in semiconductor manufacturing process

The MFC10FD digital mass flow controller consists of a mass flow sensor, a laminar flow element (laminar flow splitter), a flow control regulating valve, and an amplified control circuit. It adopts digital signal input and output, and features short warm-up time, minimal zero drift, and high reliability.