High-Accuracy Mass Flow Meter & Controller MFC20FD

MF20FD Thermal Gas Mass Flow Meter Controller

MFC20FD is a high-accuracy thermal mass flow meter and controller designed for precise gas flow measurement and closed-loop control. With ±0.5% F.S. accuracy, <0.1 s fast response, and a 2 SCCM to 30 SLM flow range, it provides reliable performance for laboratory, analytical, gas mixing, solar, and industrial applications. RS485/MODBUS and multiple analog interfaces enable easy integration with automated control systems.

Digital Mass Flow Meter & Controller MFC10FD

Digital Mass Flow Controller (MFC) used for precise gas flow control in semiconductor manufacturing process

The MFC10FD digital mass flow controller consists of a mass flow sensor, a laminar flow element (laminar flow splitter), a flow control regulating valve, and an amplified control circuit. It adopts digital signal input and output, and features short warm-up time, minimal zero drift, and high reliability.