High-Accuracy Mass Flow Meter & Controller MFC20FD

High-Accuracy Thermal Mass Flow Meter and Mass Flow Controller for Gas Measurement and Flow Control

The MFC20FD is a high-accuracy thermal mass flow meter and mass flow controller designed for precise gas flow measurement and closed-loop flow control. Based on the capillary thermal mass flow measurement principle, it measures gas mass flow with fast response, high accuracy, low zero drift, and excellent repeatability.

The integrated design combines the thermal flow sensor, tubular flow divider, electronics, and control valve, making the MFC20FD suitable for laboratory gas systems, analytical instruments, gas mixing, semiconductor and solar applications, and industrial process control.

Key Features

• High Accuracy: ±0.5% F.S. measurement accuracy
• Fast Response: Less than 0.1 s for flow measurement and less than 0.2 s for flow control
• Wide Flow Range: 2 SCCM to 30 SLM
• Wide Turndown Ratio: Up to 100:1 for flow measurement and 50:1 for flow control
• Thermal Mass Measurement: Direct gas mass flow measurement with minimal influence from temperature and pressure under normal operating conditions
• Tubular Flow Divider: Low risk of clogging and suitable for demanding gas applications
• Low Zero Drift: Short warm-up time and stable measurement performance
• Closed-Loop Control: Automatically adjusts the control valve to maintain the target gas flow
• Digital Communication: RS232 / RS485 with MODBUS protocol
• Multiple Analog Signals: 0–5 V, 1–5 V, and 4–20 mA
• Flexible Power Supply: ±15 VDC or 24 VDC
• Network Connectivity: Digital communication interface for integration with PLCs, computers, flow controllers, and other control systems

Product Overview

The MFC20FD High-Accuracy Mass Flow Meter / Controller uses a capillary thermal mass flow measurement principle to measure the mass flow rate of gases. A temperature difference generated by heat transfer around the capillary sensing element is used to determine gas mass flow.

The measured flow signal is amplified and compared with the preset flow value. The resulting control signal drives the proportional control valve, forming a closed-loop flow control system. This enables the actual gas flow rate to automatically track the user-defined setpoint.

The MFC20FD can be configured as either a mass flow meter for gas measurement or a mass flow controller (MFC) for precise gas flow regulation.

Its tubular flow-divider structure helps reduce the risk of blockage, while the fast thermal response and low zero drift provide stable performance in both laboratory and industrial applications.

Why Choose the MFC20FD?

High-Accuracy Gas Flow Measurement

With an accuracy of ±0.5% F.S. and repeatability of ±0.2% F.S., the MFC20FD is designed for applications requiring stable and precise gas flow measurement.

Fast Dynamic Response

The flow meter provides a response time of less than 0.1 seconds, while the flow controller responds in less than 0.2 seconds, enabling rapid adjustment to changing gas flow requirements.

Integrated Closed-Loop Control

For flow-control applications, the MFC20FD continuously compares the measured flow with the target setpoint and adjusts the proportional control valve automatically.

Easy System Integration

With RS485 / MODBUS, RS232, 4–20 mA, 0–5 V, and 1–5 V interfaces, the MFC20FD can be integrated with PLCs, computers, flow computers, data acquisition systems, and other process control equipment.

Applications

The MFC20FD is suitable for precise gas flow measurement and control in a wide range of industrial and laboratory applications.