MFC10FC is a differential pressure-based gas mass flow controller designed for accurate and stable measurement and control of gas flow. Unlike thermal mass flow controllers, it does not rely on the specific heat capacity of the gas, helping minimize measurement errors when switching between different gases.
With integrated flow, pressure and temperature measurement, the MFC10FC provides a compact solution for gas process monitoring, laboratory instrumentation, analytical systems and industrial gas control.
Key Features
- Differential pressure mass flow measurement with no thermal drift
- ±1.0% F.S. accuracy under standard conditions after zero adjustment
- 50:1 turndown ratio for the mass flow controller
- Flow ranges from 100 SCCM to 30 SLM
- Integrated measurement of flow rate, totalized flow, pressure and temperature
- Fast response time of approximately 200 ms
- No long warm-up requirement, with startup time of less than 5 seconds
- Built-in gas conversion coefficients for multiple gases
- No additional specific-heat-capacity error associated with thermal mass measurement
- Available with RS232 or RS485 communication
- Modbus RTU communication supported
- 0–5 VDC, 1–5 VDC and 4–20 mA signal options
- Optional solenoid proportional valve and PID control
- Stainless steel construction for demanding gas applications
Product Overview
The MFC10FC uses a differential pressure-based mass flow measurement principle. Gas flow is measured through the relationship between differential pressure and gas flow characteristics rather than through the thermal properties of the gas.
This design provides an important advantage when the measured gas differs from the gas used during factory calibration. Since the measurement principle does not depend on the gas’s specific heat capacity, the MFC10FC avoids the additional specific-heat-related error commonly associated with thermal mass flow measurement.
For applications requiring automatic flow regulation, the controller can be equipped with a proportional control valve and integrated PID control to maintain the required gas flow setpoint.
Measurement & Control
The MFC10FC can provide multiple process parameters through its display and communication interfaces:
| Parameter | Function |
|---|---|
| Instantaneous Flow | Real-time gas flow measurement |
| Totalized Flow | Accumulated gas consumption |
| Pressure | Integrated pressure measurement |
| Temperature | Integrated gas temperature measurement |
| Setpoint | Flow control target |
| Control Output | PID-based gas flow regulation |
The integrated measurement of multiple parameters makes the MFC10FC suitable for systems where flow monitoring and gas control need to be handled by a single instrument.
Gas Compatibility
The MFC10FC can be configured for different gases using built-in gas conversion coefficients. This allows one instrument platform to be adapted to a variety of gas measurement and control applications.
Typical applications include:
- Nitrogen (N₂)
- Oxygen (O₂)
- Argon (Ar)
- Carbon dioxide (CO₂)
- Air
- Hydrogen (H₂)
- Other compatible gases
For special gases or demanding process conditions, please provide the gas type, flow range, pressure, temperature and required connection so we can confirm the appropriate configuration.
Applications
| Application | Typical Use | Why MFC10FC |
|---|---|---|
| Gas Mixing & Blending | Precise control of multiple gas streams for mixing and blending systems | Stable flow measurement and fast response enable accurate gas ratio control |
| Laboratory & Analytical Equipment | Gas supply for analytical instruments, laboratory testing and research equipment | Compact design with flow, pressure and temperature monitoring |
| Industrial Process Control | Gas flow measurement and regulation in manufacturing and process equipment | ±1% F.S. accuracy and optional PID control support reliable process operation |
| Semiconductor & Electronics | Controlled gas delivery for semiconductor and electronic manufacturing equipment | High repeatability and flexible analog/communication interfaces |
| Gas Analysis | Controlled gas flow for gas analyzers and analytical testing systems | Multiple gas conversion coefficients simplify gas selection |
| Calibration & Test Systems | Gas flow measurement and control for calibration benches and test equipment | Wide turndown ratio and fast response provide flexible flow control |
| Food & Packaging | Controlled gas supply for modified atmosphere packaging and food analysis | Accurate gas flow control helps maintain consistent gas composition |
| Environmental Testing | Gas supply and flow regulation for environmental monitoring and testing equipment | Integrated measurement and digital communication simplify system integration |
| Research & Development | Gas flow control for experimental setups and prototype systems | Configurable flow ranges, signals and connections for different test requirements |
MFC10FC vs. Thermal Mass Flow Controllers
A key advantage of the MFC10FC is its differential pressure measurement technology.
Thermal mass flow controllers determine flow based partly on the thermal characteristics of the gas. When the gas composition changes, its thermal properties can introduce additional measurement uncertainty.
The MFC10FC uses differential pressure-based mass flow measurement instead, so it is less dependent on the gas’s specific heat capacity. This makes it particularly useful for applications where different gases may be measured or where stable measurement performance is important.
