High-Accuracy Differential Pressure Mass Flow Controller for Gas Measurement and Control
The MFC20FC Differential Pressure Mass Flow Controller is a high-accuracy gas mass flow measurement and control device based on differential pressure technology. Unlike thermal mass flow controllers, it has virtually no thermal drift and no thermal response lag, providing stable and repeatable gas flow measurement over long-term operation.
With ±0.5% F.S. accuracy, adjustable flow range, integrated pressure and temperature measurement, and optional proportional valve and PID control, the MFC20FC is suitable for demanding gas flow measurement and process control applications.
Key Features
- Differential pressure mass flow measurement with virtually no thermal drift
- ±0.5% F.S. accuracy under standard conditions after zero adjustment
- Long-term stability up to 0.1% F.S./year
- 100:1 adjustable range for flow measurement
- 50:1 adjustable range for flow control
- Simultaneous display of instantaneous flow, total flow, pressure and temperature
- Fast response time <0.2 s
- No long warm-up required
- Built-in gas conversion coefficients for up to 30 gases
- No additional specific-heat-related measurement error when using gas conversion coefficients
- Optional proportional control valve and built-in PID control
- Multiple communication interfaces including RS232/RS485 Modbus
- Optional Profibus, EtherCAT and Profinet
- Stainless steel construction
- Available flow ranges from 2 SCCM to 30 SLM
Product Overview
The MFC20FC is a differential pressure-based gas mass flow controller designed for accurate measurement and control of process gases.
The instrument measures gas flow using a differential pressure principle rather than a thermal sensing element. This eliminates the thermal drift and thermal response characteristics commonly associated with thermal mass flow measurement.
The MFC20FC can simultaneously measure and display:
- Instantaneous flow rate
- Totalized flow
- Gas pressure
- Gas temperature
When flow control is required, the MFC20FC can be equipped with an electromagnetic proportional valve and integrated PID control, allowing the instrument to measure and regulate gas flow within the same device.
No Specific-Heat Error from Gas Conversion
Unlike thermal mass flow controllers, the MFC20FC does not rely on gas-specific heat capacity as the primary measurement characteristic.
The controller can use built-in gas conversion coefficients for different gases. Therefore, changing the measured gas from the factory calibration gas does not introduce the additional specific-heat-related error associated with thermal mass flow measurement.
This makes the MFC20FC suitable for applications where different process gases need to be measured or controlled.
Differential Pressure Mass Flow Measurement
The MFC20FC uses a differential pressure measurement principle to determine gas mass flow.
This measurement method provides several advantages for gas flow applications:
No thermal drift → stable measurement over changing operating conditions
No thermal response lag → fast response to changes in gas flow
No thermal sensor heating → no conventional thermal sensor warm-up requirement
Gas conversion capability → suitable for measuring different gases using predefined conversion coefficients
For applications requiring both measurement and control, the optional proportional valve and PID algorithm provide a compact gas flow control solution.
Measurement and Control Functions
The MFC20FC integrates gas flow measurement and control functions into one compact instrument.
Gas Flow Measurement
The controller provides real-time gas flow measurement with ±0.5% F.S. accuracy and displays the measured flow directly on the LCD.
Total Flow Measurement
In addition to instantaneous flow, the MFC20FC can calculate and display accumulated gas consumption.
Pressure and Temperature Measurement
Pressure and temperature can be measured and displayed together with the gas flow rate, providing additional process information without requiring separate instruments.
Gas Flow Control
For applications requiring automatic flow regulation, the MFC20FC can be configured with a proportional control valve and PID algorithm.
The controller continuously compares the measured flow with the setpoint and adjusts the valve to maintain the required gas flow.
Flow Measurement → Setpoint → PID Control → Proportional Valve → Gas Flow
Applications
The MFC20FC differential pressure mass flow controller is suitable for gas measurement, gas mixing and automated gas flow control.
Typical Applications
- Semiconductor manufacturing
- Solar cell manufacturing
- Vacuum coating
- Gas mixing and gas distribution
- Gas analysis
- Environmental monitoring
- Petrochemical processes
- Coal and metallurgy
- Process manufacturing
- Analytical instruments
- Laboratory gas control
- Gas calibration systems
Application Industries
| Semiconductor | Solar Energy | Vacuum Coating | Gas Analysis |
|---|---|---|---|
| Petrochemical | Environmental | Metallurgy | Instrumentation |
| Gas Mixing | Laboratory | Process Manufacturing | Analytical Testing |
Why Choose MFC20FC?
Stable Long-Term Measurement
With virtually no thermal drift and long-term stability of up to 0.1% F.S./year, the MFC20FC is designed for applications requiring stable gas flow measurement.
Fast Dynamic Response
With a typical response time of less than 0.2 seconds, the MFC20FC can respond rapidly to changing gas flow requirements.
Wide Adjustable Range
The measurement range can be adjusted within a 100:1 range, while the flow control range can reach 50:1, allowing one instrument to cover a relatively wide operating range.
Measurement + Control in One Device
With optional proportional valve and PID control, the MFC20FC combines gas flow measurement, monitoring and control in one compact device.
MFC20FC vs. Thermal Mass Flow Controller
| Feature | MFC20FC Differential Pressure Mass Flow Controller | MFC20FD Thermal Mass Flow Controller |
|---|---|---|
| Measurement principle | Differential pressure | Thermal |
| Thermal drift | Virtually eliminated | Possible |
| Thermal response lag | No | Possible |
| Warm-up requirement | Minimal | Typically required |
| Gas conversion | Built-in coefficients | Gas-dependent |
| Specific heat effect | No additional specific-heat error | Can affect measurement |
| Pressure measurement | Integrated | Model dependent |
| Temperature measurement | Integrated | Model dependent |
| PID control | Optional | Available on selected models |
| Communication | Modbus / optional industrial protocols | Model dependent |
Note: Performance and gas conversion behavior depend on the selected configuration and operating conditions. Please contact Measflow for application-specific confirmation.
